Patents


Japan

Coaxial microwave plasma torch 2008
Plasma generator,ozone generator,substrate processing apparatus and manufacturing method of semiconductor device 2010
Microwave plasma generation method and microwave plasma generator 2010
Object processing apparatus and plasma facility comprising the same 2011
Plasma generating electrode and plasma generating method 2012
Plasma processing system 2013
Cavity resonator of microwave plasma generating apparatus 2014

USA

Object processing apparatus and plasma facility comprising the same 2008
Plasma generator,ozone generator,substrate processing apparatus and manufacturing method of semiconductor device 2009
Coaxial microwave plasma torch 2010
Cavity resonator of microwave plasma generating apparatus 2016

France

Object processing apparatus and plasma facility comprising the same 2007

UK

Object processing apparatus and plasma facility comprising the same 2007
Coaxial microwave plasma torch 2016

Germany

Object processing apparatus and plasma facility comprising the same 2007
Coaxial microwave plasma torch 2016

Korea

Object processing apparatus and plasma facility comprising the same 2007
Cavity resonator of microwave plasma generating apparatus 2016

Canada

Coaxial microwave plasma torch 2014

Switzerland

Coaxial microwave plasma torch 2016

Taiwan

Cavity resonator of microwave plasma generating apparatus 2016