Manufactures/Sells RF Plasma Generator and Matching Unit – Adtec Plasma Technology Co., Ltd.
| High frequency wattmeter for transmission line | 2002 |
| Method for starting electric discharge,treating method and treating apparatus in which the starting method is used for matter to be treated | 2008 |
| Coaxial microwave plasma torch | 2008 |
| Microwave line plasma generating device | 2008 |
| Microwave plasma torch | 2008 |
| Wire saw | 2009 |
| Plasma generator,ozone generator,substrate processing apparatus and method for manufacturing semiconductor device | 2010 |
| Microwave plasma generation method and microwave plasma generator | 2010 |
| High frequency plasma power source and impedance matching device for supplying power to a semiconductor processing apparatus | 1995 |
| System for impedance matching and power control for apparatus for high frequency plasma treatment | 1999 |
| Plasma source for generating inductively coupled plate-shaped plasma,having magnetically permeable core | 2000 |
| Object processing apparatus and plasma facility comprising the same | 2008 |
| Plasma generator,ozone generator,substrate processing apparatus and manufacturing method of Semiconductor device | 2009 |
| Microwave plasma generation method and microwave plasma generator | 2010 |
| Coaxial microwave plasma torch | 2010 |
| Object processing apparatus and plasma facility comprising the same | 2007 |
| Object processing apparatus and plasma facility comprising the same | 2007 |
| Object processing apparatus and plasma facility comprising the same | 2007 |
| Object processing apparatus and plasma facility comprising the same | 2007 |
| ADline | 2008 |